Hamamatsu News 2-2016 - page 21

OPTO-SEMICONDUCTOR PRODUCTS
21
News 2016 Vol. 2
MEMS Mirror
S12237-03P
ND Inspection
Industry
Security
Optical Comms
Semicon Prod.
Analytical
Measurement
Drug Discovery
Life Science
Medical
Academic Res.
Ultra-miniature, high performance
Electromagnetically driven laser scanning MEMS mirror
The S12237-03P is an electromagnetically driven mirror that incorporates our
unique Micro-Electro-Mechanical Systems (MEMS) technology. We achieved
an ultraminiature scale by mounting the magnet beneath the mirror. Within
a magnetic field generated by the magnet, electrical current flowing in the coil
surrounding the mirror produces a Lorentz force based on Fleming’s rule that
drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection
angle and high mirror reflectivity as well as low power consumption.
Features
„
„
Low current operation: 5 V max.
„
„
Compact
„
„
Wide optical deflection angle
Applications
„
„
Laser scanner unit
„
„
Optical switches
In a MEMS mirror, a metallic coil is formed on a single-crystal
silicon, a mirror is formed inside the coil through MEMS
processing, and a magnet is arranged beneath the mirror.
Within a magnetic field generated by the magnet, electrical
current flowing in the coil surrounding the mirror produces
a Lorentz force based on Fleming’s rule that drives the mirror
tilt angle in one dimension. The path of the laser light incident
on the mirror surface is varied in this way to scan and project.
Compared to the electrostatic or piezoelectric driven mirrors,
electromagnetically driven MEMS mirrors are smaller, lower
voltage driven, and lower power consuming.
S12237-03P
Laser light
Force
Current
Force
Magnet
Magnetic
field
Coil
Current
Structure and principle
Specifications
Parameter
Specification
Unit
Operation mode
Linear mode
-
Mirror size
φ
2.6
mm
Resonant frequency
530
Hz
Optical deflection angle*
1
±15
degrees
*1 The optical deflection angle is twice the mechanical deflection angle.
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