Hamamatsu News 1 / 2018

OPTO-SEMICONDUCTOR PRODUCTS 19 News 2018 Vol. 1 New C14272 MEMS-FPI Spectrum Sensor C14272 Academic Res. ND Inspection Industry Security Optical Comms Semicon Prod. Analytical Measurement Drug Discovery Life Science Medical Introducing a new wavelength type – ultra-compact spectrum sensor for near-infrared light The MEMS-FPI spectrum sensor C14272 is an ultra-compact sensor that houses a MEMS-FPI (Fabry-Perot Interferometer) tunable filter that can vary its transmission wavelength depending on the applied voltage and an InGaAs PIN photodiode in a single package. The C14272, a new type added to the lineup, has a spectral response range of 1.35 to 1.65 μm. Along with the previous C13272-02 (spectral response range: 1.55 to 1.85 μm), it is suitable for installation in compact instruments for simply measuring material absorbance. Features „ „ Built-in Hamamatsu InGaAs PIN photodiode single element chip „ „ Spectral response range: 1.35 to 1.65 μm „ „ Spectral resolution: 18 nm max. „ „ Ultra-compact: TO-5 package „ „ Ultra light: 1 g „ „ Hermetically sealed package: High reliability in high humidity environment „ „ Built-in thermistor „ „ Built-in band-pass filter for cutting off wavelengths outside the spectral response range „ „ An evaluation circuit C13294-02 is available (sold separately) Application „ „ Portable spectrophotometers Specifications (compared with the previous type) Ta=25 deg. C. Parameter New C14272 C13272-02 Unit Spectral response range 1.35 to 1.65 1.55 to 1.85 µm Spectral resolution (FWHM) max. 18 20 nm Photosensitive area (photosensor) φ 300 φ 100 µm Spectrum sensor structure Tunable filter cross section Sacrificial layer etching hole Incident light Transmission wavelength λ Upper mirror Lower mirror Air gap Substrate Photosensor (InGaAs PIN photodiode) MEMS-FPI tunable filter Wiring board Spacer Band-pass filter Measurement sample (water) Light source (Tungsten lamp) MEMS-FPI spectrum sensor Showing absorbance profiles Sacrificial layer etching hole Incident light Transmission wavelength λ Upper mirror Lower mirror Air gap Substrate Photosensor (InGaAs PIN photodiode) MEMS-FPI tunable filter Wiring board Spacer Band-pass filter Measurement sample (water) Light source (Tungsten lamp) MEMS-FPI spectrum sensor Showing absorbance profiles Application example (spectrometry) Photosensor (InGaAs PIN photodiode) MEMS-FPI tunable filter Wiring board Spacer Band-pass filter Measurement sample (water) Light source (Tungsten lamp) MEMS-FPI spectrum sensor Showing absorbance profiles