Hamamatsu News 1 / 2018
SYSTEMS PRODUCTS 25 News 2018 Vol. 1 Thermal F1 Emission Microscope C14229-01 Non-destructive electrical failure analysis system for packaged devices Thermal F1 is a thermal emission microscope equipped with a high sensitivity InSb camera that indicates abnormal heat generated inside a semiconductor device. Its single function and small size with user friendly software are suitable for initial analysis for quick defect localization. Specifications High sensitivity thermal detector (InSb) with motorized stage and 5 lens turret controlled through software Objective lens for IR (0.29x, 0.8x, 4x, 8x ) and NIR 5x for probing Thermal lock-in unit with power supply voltage selectable Features High sensitivity thermal camera with lock-in function Windowing function up to 2,000 fps Optimally designed IR optics with probing camera unit Stitching function for large field of view Applications Short-circuit of metalization Abnormality of contact holes Microplasma leakage in oxide layer Oxide layer breakdown TFT leakage/Organic EL leakage C14229-01 ND Inspection Industry Security Optical Comms Semicon Prod. Analytical Measurement Drug Discovery Life Science Medical Academic Res. New
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