Hamamatsu News 1 / 2018

SYSTEMS PRODUCTS 25 News 2018 Vol. 1 Thermal F1 Emission Microscope C14229-01 Non-destructive electrical failure analysis system for packaged devices Thermal F1 is a thermal emission microscope equipped with a high sensitivity InSb camera that indicates abnormal heat generated inside a semiconductor device. Its single function and small size with user friendly software are suitable for initial analysis for quick defect localization. Specifications „ „ High sensitivity thermal detector (InSb) with motorized stage and 5 lens turret controlled through software „ „ Objective lens for IR (0.29x, 0.8x, 4x, 8x ) and NIR 5x for probing „ „ Thermal lock-in unit with power supply voltage selectable Features „ „ High sensitivity thermal camera with lock-in function „ „ Windowing function up to 2,000 fps „ „ Optimally designed IR optics with probing camera unit „ „ Stitching function for large field of view Applications „ „ Short-circuit of metalization „ „ Abnormality of contact holes „ „ Microplasma leakage in oxide layer „ „ Oxide layer breakdown „ „ TFT leakage/Organic EL leakage C14229-01 ND Inspection Industry Security Optical Comms Semicon Prod. Analytical Measurement Drug Discovery Life Science Medical Academic Res. New

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