Hamamatsu News 1 / 2020

21 News 2020 Vol.1 This is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical systems) technology. With two-axis operation (X axis and Y axis), 2D scanning (raster scanning) becomes possible using reflections of laser light or the like. Typically, electro­ magnetically driven mirrors have magnets arranged around the mirror chip, but Hamamatsu MEMS mirrors have a strong compact magnet arranged underneath the mirror chip. It achieves a wide optical deflection angle (fast axis: ±20°, slow axis: ±12°). In addition, it features high reliability owing to the hermetic seal Miniature, High Performance Electromagnetically Driven MEMS Mirror for 2D Laser Scanning MEMS Mirror S13989-01H New OPTO-SEMICONDUCTOR PRODUCTS package, low voltage operation, and linear operation that allows the optical deflection angle to be set as you like. Features „ „ Compact „ „ Wide optical deflection angle „ „ Low voltage operation: n  Suitable for installation with equipment „ „ High reliability: n  Hermetic seal package „ „ Linear operation possible (S12237-03P, slow axis of S13989-01H) n  Optical deflection angle can be set as you like Lineup Parameter S12237-03P New S13989-01H Appearance Type For 1D scanning For 2D scanning Scan mode 1-axis linear scan 2-axis raster scan Mirror size (material)  2.6 mm (aluminum)  1.23 mm (aluminum) Optical deflection angle ±15° Fast axis: ±20° Slow axis: ±12° Drive frequency 100 Hz max. Fast axis: 29.3 kHz typ. Slow axis: 100 Hz max. Recommended operating temperature -20 to +70 deg. C. -20 to +60 deg. C. Structure and principle Application examples It employs a drive method that uses an electromagnetic actuator. When a current is run through the coil in the magnetic field of the magnet, Lorentz force is generated according to the Fleming’s rule, tilting the mirror. In addition, the mirror can be driven two-dimensionally with the combination of two springs formed by MEMS processing. Force Laser light Force Magnet Coil Magnetic field Current Current Laser microscope Machine vision Laser ranging